SOI high temperature circuits - surmount limitation of Si integrated circuits in high temperature application

Xinzhong Duo; Miao Zhang; Jianxia Gao; Lianwei Wang; Chenglu Lin

SOI high temperature circuits - surmount limitation of Si integrated circuits in high temperature application

Xinzhong Duo, Miao Zhang, Jianxia Gao, Lianwei Wang, Chenglu Lin

CAS - Shanghai Institute of Microsystem and Information Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Ordinary bulk silicon circuits can work only below 200 °C, but SOI (silicon on insulator) circuits can work at higher temperature. The market demand for high temperature circuits was described and the characteristics of SOI circuits working at high temperature were analyzed. The technical problems which must be solved for commercializing the SOI circuits were discussed.

Original language	English
Pages (from-to)	36-42
Number of pages	7
Journal	Weixi Jiagong Jishu/Microfabrication Technology
Issue number	4
State	Published - 1998
Externally published	Yes

Cite this

@article{84665d74163c48549758bab9df6af68a,

title = "SOI high temperature circuits - surmount limitation of Si integrated circuits in high temperature application",

abstract = "Ordinary bulk silicon circuits can work only below 200 °C, but SOI (silicon on insulator) circuits can work at higher temperature. The market demand for high temperature circuits was described and the characteristics of SOI circuits working at high temperature were analyzed. The technical problems which must be solved for commercializing the SOI circuits were discussed.",

author = "Xinzhong Duo and Miao Zhang and Jianxia Gao and Lianwei Wang and Chenglu Lin",

year = "1998",

language = "英语",

pages = "36--42",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

number = "4",

}

TY - JOUR

T1 - SOI high temperature circuits - surmount limitation of Si integrated circuits in high temperature application

AU - Duo, Xinzhong

AU - Zhang, Miao

AU - Gao, Jianxia

AU - Wang, Lianwei

AU - Lin, Chenglu

PY - 1998

Y1 - 1998

N2 - Ordinary bulk silicon circuits can work only below 200 °C, but SOI (silicon on insulator) circuits can work at higher temperature. The market demand for high temperature circuits was described and the characteristics of SOI circuits working at high temperature were analyzed. The technical problems which must be solved for commercializing the SOI circuits were discussed.

AB - Ordinary bulk silicon circuits can work only below 200 °C, but SOI (silicon on insulator) circuits can work at higher temperature. The market demand for high temperature circuits was described and the characteristics of SOI circuits working at high temperature were analyzed. The technical problems which must be solved for commercializing the SOI circuits were discussed.

UR - https://www.scopus.com/pages/publications/0032281418

M3 - 文章

AN - SCOPUS:0032281418

SN - 1003-8213

SP - 36

EP - 42

JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 4

ER -

SOI high temperature circuits - surmount limitation of Si integrated circuits in high temperature application

Abstract

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