Simulation and fabrication of carbon nanotubes field emission pressure sensors

Kaiyou Qian; Ting Chen; Bingyong Yan; Yangkui Lin; Dong Xu; Zhuo Sun; Bingchu Cai

doi:10.1016/j.apsusc.2005.06.029

Simulation and fabrication of carbon nanotubes field emission pressure sensors

Kaiyou Qian^*
, Ting Chen
, Bingyong Yan
, Yangkui Lin
, Dong Xu
, Zhuo Sun
, Bingchu Cai

^*Corresponding author for this work

School of Physics and Electronic Science

Ministry of Education of the People's Republic of China
East China Normal University

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

Original language	English
Pages (from-to)	4198-4201
Number of pages	4
Journal	Applied Surface Science
Volume	252
Issue number	12
DOIs	https://doi.org/10.1016/j.apsusc.2005.06.029
State	Published - 15 Apr 2006

Keywords

Carbon nanotubes
Field emission
Pressure sensors

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10.1016/j.apsusc.2005.06.029

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title = "Simulation and fabrication of carbon nanotubes field emission pressure sensors",

abstract = "A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.",

keywords = "Carbon nanotubes, Field emission, Pressure sensors",

author = "Kaiyou Qian and Ting Chen and Bingyong Yan and Yangkui Lin and Dong Xu and Zhuo Sun and Bingchu Cai",

year = "2006",

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doi = "10.1016/j.apsusc.2005.06.029",

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T1 - Simulation and fabrication of carbon nanotubes field emission pressure sensors

AU - Qian, Kaiyou

AU - Chen, Ting

AU - Yan, Bingyong

AU - Lin, Yangkui

AU - Xu, Dong

AU - Sun, Zhuo

AU - Cai, Bingchu

PY - 2006/4/15

Y1 - 2006/4/15

N2 - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

AB - A novel field emission pressure sensor has been achieved utilizing carbon nanotubes (CNTs) as the electron source. The sensor consists of the anode sensing film fabricated by wet etching process and multi-wall carbon nanotubes (MWNTs) cathode in the micro-vacuum chamber. MWNTs on the silicon substrate were grown by thermal CVD. The prototype pressure sensor has a measured sensitivity of about 0.17-0.77 nA/Pa (101-550 KPa). The work shows the potential use of CNTs-based field-emitter in microsensors, such as accelerometers and tactile sensors.

KW - Carbon nanotubes

KW - Field emission

KW - Pressure sensors

UR - https://www.scopus.com/pages/publications/33748063977

U2 - 10.1016/j.apsusc.2005.06.029

DO - 10.1016/j.apsusc.2005.06.029

M3 - 文章

AN - SCOPUS:33748063977

SN - 0169-4332

VL - 252

SP - 4198

EP - 4201

JO - Applied Surface Science

JF - Applied Surface Science

IS - 12

ER -

Simulation and fabrication of carbon nanotubes field emission pressure sensors

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Keywords

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