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Silicon-based high sensitivity of room-temperature microwave and sub-terahertz detector

  • Caiyang Wu
  • , Wei Zhou
  • , Niangjuan Yao
  • , Xinyue Xu
  • , Yue Qu
  • , Zhibo Zhang
  • , Jing Wu
  • , Lin Jiang
  • , Zhiming Huang
  • , Junhao Chu
  • CAS - Shanghai Institute of Technical Physics
  • University of Chinese Academy of Sciences
  • ShanghaiTech University

Research output: Contribution to journalArticlepeer-review

Abstract

We demonstrated a Si-based photoelectric detector with silicon-on-insulator structure. The Si-based detector was successfully fabricated and showed broadband response from 20-40 GHz to 0.165-0.173 THz radiation at room temperature. It achieved a maximal responsivity of 49.3 kV W-1 and noise equivalent power (NEP) of 0.38 at 20-40 GHz, and achieved a responsivity of 3.3 kV W-1 and NEP of 5.7 at 0.165-0.173 THz; moreover, a short response time ∼810 ns was realized for the detector. The simple structure, excellent performance and easy integration of the detectors, which provides an avenue to the optoelectronic integration of sensitive room-temperature terahertz focal-plane arrays.

Original languageEnglish
Article number052013
JournalApplied Physics Express
Volume12
Issue number5
DOIs
StatePublished - 1 May 2019
Externally publishedYes

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