Separated CuInSe2 quantum dots on ZnO thin film by ICP-assisted magnetron sputtering

S. Y. Huang; S. Xu; J. D. Long; Q. J. Cheng; X. B. Xu; J. B. Chu

doi:10.1142/S0218625X07009293

Separated CuInSe₂ quantum dots on ZnO thin film by ICP-assisted magnetron sputtering

S. Y. Huang, S. Xu, J. D. Long, Q. J. Cheng, X. B. Xu, J. B. Chu

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Uniformly hemispherical separated CuInSe₂ (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer layer. The average lateral size and densities of the QDs could be controlled by appropriate deposition parameters. The distribution scope of diameters was from 40 to 120 nm, density was from 4.5E9 to 2.1E11/cm². Field-emission scanning electron microscope (FE-SEM) and energy-dispersive X-ray (EDX) spectrometer were adopted to measure the properties of CIS QDs.

Original language	English
Pages (from-to)	225-228
Number of pages	4
Journal	Surface Review and Letters
Volume	14
Issue number	2
DOIs	https://doi.org/10.1142/S0218625X07009293
State	Published - Apr 2007

Keywords

CIS
ICP-assisted magnetron
Quantum dots

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10.1142/S0218625X07009293

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title = "Separated CuInSe2 quantum dots on ZnO thin film by ICP-assisted magnetron sputtering",

abstract = "Uniformly hemispherical separated CuInSe2 (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer layer. The average lateral size and densities of the QDs could be controlled by appropriate deposition parameters. The distribution scope of diameters was from 40 to 120 nm, density was from 4.5E9 to 2.1E11/cm2. Field-emission scanning electron microscope (FE-SEM) and energy-dispersive X-ray (EDX) spectrometer were adopted to measure the properties of CIS QDs.",

keywords = "CIS, ICP-assisted magnetron, Quantum dots",

author = "Huang, \{S. Y.\} and S. Xu and Long, \{J. D.\} and Cheng, \{Q. J.\} and Xu, \{X. B.\} and Chu, \{J. B.\}",

year = "2007",

month = apr,

doi = "10.1142/S0218625X07009293",

language = "英语",

volume = "14",

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TY - JOUR

T1 - Separated CuInSe2 quantum dots on ZnO thin film by ICP-assisted magnetron sputtering

AU - Huang, S. Y.

AU - Xu, S.

AU - Long, J. D.

AU - Cheng, Q. J.

AU - Xu, X. B.

AU - Chu, J. B.

PY - 2007/4

Y1 - 2007/4

N2 - Uniformly hemispherical separated CuInSe2 (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer layer. The average lateral size and densities of the QDs could be controlled by appropriate deposition parameters. The distribution scope of diameters was from 40 to 120 nm, density was from 4.5E9 to 2.1E11/cm2. Field-emission scanning electron microscope (FE-SEM) and energy-dispersive X-ray (EDX) spectrometer were adopted to measure the properties of CIS QDs.

AB - Uniformly hemispherical separated CuInSe2 (CIS) quantum dots (QDs) were fabricated by low-frequency inductivity coupled plasma (LF-ICP) assisted radio-frequency (RF) magnetron sputtering technique from a ternary compound target on Si (100) and glass substrate with ZnO film serving as buffer layer. The average lateral size and densities of the QDs could be controlled by appropriate deposition parameters. The distribution scope of diameters was from 40 to 120 nm, density was from 4.5E9 to 2.1E11/cm2. Field-emission scanning electron microscope (FE-SEM) and energy-dispersive X-ray (EDX) spectrometer were adopted to measure the properties of CIS QDs.

KW - CIS

KW - ICP-assisted magnetron

KW - Quantum dots

UR - https://www.scopus.com/pages/publications/34547291923

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DO - 10.1142/S0218625X07009293

M3 - 文章

AN - SCOPUS:34547291923

SN - 0218-625X

VL - 14

SP - 225

EP - 228

JO - Surface Review and Letters

JF - Surface Review and Letters

IS - 2

ER -

Separated CuInSe₂ quantum dots on ZnO thin film by ICP-assisted magnetron sputtering

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Keywords

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