Separated AlxIn1-xN quantum dots grown by plasma-reactive co-sputtering

S. Y. Huang; S. Y. Xu; J. D. Long; Z. Sun; X. Z. Wang; Y. W. Chen; T. Chen; C. Ni; Z. J. Zhang; L. L. Wang; X. D. Li; P. S. Guo; W. X. Que

doi:10.1016/j.physe.2005.12.156

Separated Al_xIn_1-xN quantum dots grown by plasma-reactive co-sputtering

S. Y. Huang, S. Y. Xu, J. D. Long, Z. Sun, X. Z. Wang, Y. W. Chen, T. Chen, C. Ni, Z. J. Zhang, L. L. Wang, X. D. Li, P. S. Guo, W. X. Que

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Separated Al_xIn_1-xN quantum dots (QDs) embedded in amorphous AlN films have been produced by radio-frequency co-sputtering technique on silicon (1 1 1) and quartz glass substrates. The mean size and density of Al_xIn_1-xN QDs can be conveniently monitored by deposition parameters. Transparent electron microscope, and X-ray diffraction were used to detect the structure of the Al_xIn_1-xN QDs system; field-emission scanning-electron microscope was adopted to measure the surface morphology and anticipate the size of the QDs; X-ray photoelectronic spectroscopy was used to measure the stoichiometric ratios of the QDs.

Original language	English
Pages (from-to)	200-203
Number of pages	4
Journal	Physica E: Low-Dimensional Systems and Nanostructures
Volume	31
Issue number	2
DOIs	https://doi.org/10.1016/j.physe.2005.12.156
State	Published - Mar 2006

Keywords

ICP-assisted magnetron
Quantum dots
Separated

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@article{d1d6dfe498084214a8117880b139e094,

title = "Separated AlxIn1-xN quantum dots grown by plasma-reactive co-sputtering",

abstract = "Separated AlxIn1-xN quantum dots (QDs) embedded in amorphous AlN films have been produced by radio-frequency co-sputtering technique on silicon (1 1 1) and quartz glass substrates. The mean size and density of AlxIn1-xN QDs can be conveniently monitored by deposition parameters. Transparent electron microscope, and X-ray diffraction were used to detect the structure of the AlxIn1-xN QDs system; field-emission scanning-electron microscope was adopted to measure the surface morphology and anticipate the size of the QDs; X-ray photoelectronic spectroscopy was used to measure the stoichiometric ratios of the QDs.",

keywords = "ICP-assisted magnetron, Quantum dots, Separated",

author = "Huang, \{S. Y.\} and Xu, \{S. Y.\} and Long, \{J. D.\} and Z. Sun and Wang, \{X. Z.\} and Chen, \{Y. W.\} and T. Chen and C. Ni and Zhang, \{Z. J.\} and Wang, \{L. L.\} and Li, \{X. D.\} and Guo, \{P. S.\} and Que, \{W. X.\}",

year = "2006",

month = mar,

doi = "10.1016/j.physe.2005.12.156",

language = "英语",

volume = "31",

pages = "200--203",

journal = "Physica E: Low-Dimensional Systems and Nanostructures",

issn = "1386-9477",

publisher = "Elsevier B.V.",

number = "2",

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T1 - Separated AlxIn1-xN quantum dots grown by plasma-reactive co-sputtering

AU - Huang, S. Y.

AU - Xu, S. Y.

AU - Long, J. D.

AU - Sun, Z.

AU - Wang, X. Z.

AU - Chen, Y. W.

AU - Chen, T.

AU - Ni, C.

AU - Zhang, Z. J.

AU - Wang, L. L.

AU - Li, X. D.

AU - Guo, P. S.

AU - Que, W. X.

PY - 2006/3

Y1 - 2006/3

N2 - Separated AlxIn1-xN quantum dots (QDs) embedded in amorphous AlN films have been produced by radio-frequency co-sputtering technique on silicon (1 1 1) and quartz glass substrates. The mean size and density of AlxIn1-xN QDs can be conveniently monitored by deposition parameters. Transparent electron microscope, and X-ray diffraction were used to detect the structure of the AlxIn1-xN QDs system; field-emission scanning-electron microscope was adopted to measure the surface morphology and anticipate the size of the QDs; X-ray photoelectronic spectroscopy was used to measure the stoichiometric ratios of the QDs.

AB - Separated AlxIn1-xN quantum dots (QDs) embedded in amorphous AlN films have been produced by radio-frequency co-sputtering technique on silicon (1 1 1) and quartz glass substrates. The mean size and density of AlxIn1-xN QDs can be conveniently monitored by deposition parameters. Transparent electron microscope, and X-ray diffraction were used to detect the structure of the AlxIn1-xN QDs system; field-emission scanning-electron microscope was adopted to measure the surface morphology and anticipate the size of the QDs; X-ray photoelectronic spectroscopy was used to measure the stoichiometric ratios of the QDs.

KW - ICP-assisted magnetron

KW - Quantum dots

KW - Separated

UR - https://www.scopus.com/pages/publications/33644884770

U2 - 10.1016/j.physe.2005.12.156

DO - 10.1016/j.physe.2005.12.156

M3 - 文章

AN - SCOPUS:33644884770

SN - 1386-9477

VL - 31

SP - 200

EP - 203

JO - Physica E: Low-Dimensional Systems and Nanostructures

JF - Physica E: Low-Dimensional Systems and Nanostructures

IS - 2

ER -

Separated Al_xIn_1-xN quantum dots grown by plasma-reactive co-sputtering

Abstract

Keywords

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