@inproceedings{9ec059d6d54f41be9e4f28626756f56a,
title = "Self-Heating Effects Investigation on Nanoscale FinFET and Its Thermal Resistance Modeling",
abstract = "The self-heating effect in nanoscale device has become one of the most serious issues in device design for future scaling nodes. In this paper, the thermal characteristics of sub-14-nm FinFETs have been studied and evaluated by the TCAD simulations, in which the hydrodynamic and thermodynamic transport models have been adopted and the parameters have been calibrated with the experimental data. The simulation results show that, 1) heat dissipation is sensitive to the dimension of S/D extension, 2) temperature variation is caused by the change of doping concentration, which can be further suppressed by shrinking the extension length, and 3) different fin widths and fin heights have significant impacts on electrical characteristic, and then on the hotspot and the lumped thermal resistance.",
author = "Sun, \{Jun Ya\} and Liu, \{Ren Hua\} and Li, \{Xiao Jin\} and Sun, \{Ya Bin\} and Shi, \{Yan Ling\} and Chen, \{Shou Mian\} and Hu, \{Shao Jian\} and Ao Guo",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 ; Conference date: 31-10-2018 Through 03-11-2018",
year = "2018",
month = dec,
day = "5",
doi = "10.1109/ICSICT.2018.8564853",
language = "英语",
series = "2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Ting-Ao Tang and Fan Ye and Yu-Long Jiang",
booktitle = "2018 14th IEEE International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2018 - Proceedings",
address = "美国",
}