Selective metallization on insulator surfaces with femtosecond laser pulses

  • Jian Xu*
  • , Yang Liao
  • , Huidan Zeng
  • , Zenghui Zhou
  • , Haiyi Sun
  • , Juan Song
  • , Xinshun Wang
  • , Ya Cheng
  • , Zhizhan Xu
  • , Koji Sugioka
  • , Katsumi Midorikawa
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

76 Scopus citations

Abstract

We report selective metallization on surfaces of insulators (glass slides and lithium niobate crystal) based on femtosecond laser modification combined with electroless plating. The process is mainly composed of four steps: (1) formation of silver nitrate thin films on the surfaces of glass or crystal substrates; (2) generation of silver particles in the irradiated area by femtosecond laser direct writing; (3) removal of unirradiated silver nitrate films; and (4) selective electroless plating in the modified area. We discuss the mechanism of selective metallization on the insulators. Moreover, we investigate the electrical and adhesive properties of the copper microstructures patterned on the insulator surfaces, showing great potential of integrating electrical functions into lab-on-a-chip devices.

Original languageEnglish
Pages (from-to)12743-12748
Number of pages6
JournalOptics Express
Volume15
Issue number20
DOIs
StatePublished - 1 Oct 2007
Externally publishedYes

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