SBT ferroelectric thin films prepared by pulsed excimer laser deposition

Pingxiong Yang; Lirong Zheng; Lianwei Wang; Chenglu Lin; Ningsheng Zhou; Huaixian Lu

SBT ferroelectric thin films prepared by pulsed excimer laser deposition

Pingxiong Yang^*
, Lirong Zheng
, Lianwei Wang
, Chenglu Lin
, Ningsheng Zhou
, Huaixian Lu

^*Corresponding author for this work

CAS - Shanghai Institute of Microsystem and Information Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The perovskite-like SrBi₂Ta₂O₉ thin films have been successfully prepared on Si/SiO₂/Ti/Pt substrate by pulsed excimer laser deposition. The crystallization and ferroelectric property were clearly dependent on the substrate temperature. The SrBi₂Ta₂O₉ thin film with fine grain size and well-saturated square hysteresis loop was obtained at 450°C substrate temperature. Good ferroelectric properties were obtained from the SBT film; residual polarization Pr and coercive electric field Ec were 8.4 μC/cm² and 57 kV/cm, respectively.

Original language	English
Pages (from-to)	397-400
Number of pages	4
Journal	Zhongguo Jiguang/Chinese Journal of Lasers
Volume	24
Issue number	5
State	Published - May 1997
Externally published	Yes

Cite this

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title = "SBT ferroelectric thin films prepared by pulsed excimer laser deposition",

abstract = "The perovskite-like SrBi2Ta2O9 thin films have been successfully prepared on Si/SiO2/Ti/Pt substrate by pulsed excimer laser deposition. The crystallization and ferroelectric property were clearly dependent on the substrate temperature. The SrBi2Ta2O9 thin film with fine grain size and well-saturated square hysteresis loop was obtained at 450°C substrate temperature. Good ferroelectric properties were obtained from the SBT film; residual polarization Pr and coercive electric field Ec were 8.4 μC/cm2 and 57 kV/cm, respectively.",

author = "Pingxiong Yang and Lirong Zheng and Lianwei Wang and Chenglu Lin and Ningsheng Zhou and Huaixian Lu",

year = "1997",

month = may,

language = "英语",

volume = "24",

pages = "397--400",

journal = "Zhongguo Jiguang/Chinese Journal of Lasers",

issn = "0258-7025",

publisher = "Science Press ",

number = "5",

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TY - JOUR

T1 - SBT ferroelectric thin films prepared by pulsed excimer laser deposition

AU - Yang, Pingxiong

AU - Zheng, Lirong

AU - Wang, Lianwei

AU - Lin, Chenglu

AU - Zhou, Ningsheng

AU - Lu, Huaixian

PY - 1997/5

Y1 - 1997/5

N2 - The perovskite-like SrBi2Ta2O9 thin films have been successfully prepared on Si/SiO2/Ti/Pt substrate by pulsed excimer laser deposition. The crystallization and ferroelectric property were clearly dependent on the substrate temperature. The SrBi2Ta2O9 thin film with fine grain size and well-saturated square hysteresis loop was obtained at 450°C substrate temperature. Good ferroelectric properties were obtained from the SBT film; residual polarization Pr and coercive electric field Ec were 8.4 μC/cm2 and 57 kV/cm, respectively.

AB - The perovskite-like SrBi2Ta2O9 thin films have been successfully prepared on Si/SiO2/Ti/Pt substrate by pulsed excimer laser deposition. The crystallization and ferroelectric property were clearly dependent on the substrate temperature. The SrBi2Ta2O9 thin film with fine grain size and well-saturated square hysteresis loop was obtained at 450°C substrate temperature. Good ferroelectric properties were obtained from the SBT film; residual polarization Pr and coercive electric field Ec were 8.4 μC/cm2 and 57 kV/cm, respectively.

UR - https://www.scopus.com/pages/publications/0031142730

M3 - 文章

AN - SCOPUS:0031142730

SN - 0258-7025

VL - 24

SP - 397

EP - 400

JO - Zhongguo Jiguang/Chinese Journal of Lasers

JF - Zhongguo Jiguang/Chinese Journal of Lasers

IS - 5

ER -

SBT ferroelectric thin films prepared by pulsed excimer laser deposition

Abstract

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