TY - GEN
T1 - Reversible and Irreversible Polarization Degradation of Hf0.5Zr0.5O2Capacitors with Coherent Structural Transition at Elevated Temperatures
AU - Gao, Zhaomeng
AU - Xin, Tianjiao
AU - Liu, Cheng
AU - Xu, Yilin
AU - Wang, Yiwei
AU - Zheng, Yunzhe
AU - Wang, Rui
AU - Li, Xiaotian
AU - Zheng, Yonghui
AU - Du, Kai
AU - Su, Diqing
AU - Zhang, Zhaohao
AU - Yin, Huaxiang
AU - Zhang, Weifeng
AU - Li, Chao
AU - Lin, Xiaoling
AU - Jiang, Haitao
AU - Song, Sannian
AU - Song, Zhitang
AU - Cheng, Yan
AU - Lyu, Hangbing
N1 - Publisher Copyright:
© 2024 IEEE.
PY - 2024
Y1 - 2024
N2 - In this study, we investigated the reversible and irreversible polarization degradation of hafnia-based ferroelectric capacitors (FeCAPs) using the state-of-the-art spherical aberration corrected transmission electron microscope (Cs-TEM) with realtime temperature changes. The key observations are as follows: (1) Rapid thermal annealing (RTA) results in incomplete formation of the orthorhombic (o-) phase in the ferroelectric (FE) material, leading to a coherent phase boundary (CPB) between o- and tetragonal (t-) structures. (2) The movement of the o-/t-CPB with temperature corresponds to reversible changes in polarization of hafnia-based FeCAPs. (3) Irreversible degradation in polarization occurs due to migration of the o-/monoclinic (m-) CPB with temperature. These findings provide a new perspective for evaluating the stability of the o-phase in fluorite-type FE materials and offer guidance for optimizing their properties through regulation strategies.
AB - In this study, we investigated the reversible and irreversible polarization degradation of hafnia-based ferroelectric capacitors (FeCAPs) using the state-of-the-art spherical aberration corrected transmission electron microscope (Cs-TEM) with realtime temperature changes. The key observations are as follows: (1) Rapid thermal annealing (RTA) results in incomplete formation of the orthorhombic (o-) phase in the ferroelectric (FE) material, leading to a coherent phase boundary (CPB) between o- and tetragonal (t-) structures. (2) The movement of the o-/t-CPB with temperature corresponds to reversible changes in polarization of hafnia-based FeCAPs. (3) Irreversible degradation in polarization occurs due to migration of the o-/monoclinic (m-) CPB with temperature. These findings provide a new perspective for evaluating the stability of the o-phase in fluorite-type FE materials and offer guidance for optimizing their properties through regulation strategies.
KW - Coherent phase boundary
KW - Ferroelectric memory
KW - Hafnia-based ferroelectric capacitor
KW - Polarization degradation
UR - https://www.scopus.com/pages/publications/85194106614
U2 - 10.1109/IRPS48228.2024.10529400
DO - 10.1109/IRPS48228.2024.10529400
M3 - 会议稿件
AN - SCOPUS:85194106614
T3 - IEEE International Reliability Physics Symposium Proceedings
BT - 2024 IEEE International Reliability Physics Symposium, IRPS 2024 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2024 IEEE International Reliability Physics Symposium, IRPS 2024
Y2 - 14 April 2024 through 18 April 2024
ER -