RESET distribution improvement of phase change memory: The impact of pre-programming

  • Yuchan Wang
  • , Xiaogang Chen
  • , Yan Cheng
  • , Xilin Zhou
  • , Shilong Lv
  • , Yifeng Chen
  • , Yueqing Wang
  • , Mi Zhou
  • , Houpeng Chen
  • , Yiyun Zhang
  • , Zhitang Song
  • , Gaoming Feng

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

Some nonvolatile phase change memory (PCM) cells with 80-nm heating electrodes are found very difficult to RESET at 3 mA, which directly affects the RESET distribution of the PCM. The large crystal grains with hexagonal structure in the active phase change area, discovered by transmission electron microscope, are the major reason. One preprogramming testing method is introduced, and the resistance distributions of the PCM cells before and after preprogramming are presented. Results show that the large hexagonal crystal grains have been eliminated, thus the resistance distributions have been greatly improved after preprogramming.

Original languageEnglish
Article number6767089
Pages (from-to)536-538
Number of pages3
JournalIEEE Electron Device Letters
Volume35
Issue number5
DOIs
StatePublished - May 2014
Externally publishedYes

Keywords

  • Phase change memory (PCM)
  • RESET
  • pre-programming.
  • resistance distribution

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