Research on carbon nanotube array field emission pressure sensors

K. Qian; T. Chen; B. Yan; Y. Lin; D. Xu; Z. Sun; B. Cai

doi:10.1049/el:20051360

Research on carbon nanotube array field emission pressure sensors

K. Qian, T. Chen, B. Yan, Y. Lin, D. Xu, Z. Sun, B. Cai

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.

Original language	English
Pages (from-to)	824-825
Number of pages	2
Journal	Electronics Letters
Volume	41
Issue number	14
DOIs	https://doi.org/10.1049/el:20051360
State	Published - 7 Jul 2005

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abstract = "A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.",

author = "K. Qian and T. Chen and B. Yan and Y. Lin and D. Xu and Z. Sun and B. Cai",

year = "2005",

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AU - Qian, K.

AU - Chen, T.

AU - Yan, B.

AU - Lin, Y.

AU - Xu, D.

AU - Sun, Z.

AU - Cai, B.

PY - 2005/7/7

Y1 - 2005/7/7

N2 - A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.

AB - A novel field emission pressure sensor has been achieved using carbon nanotube (CNT) arrays as the field emitters. The sensor consists of the anode elastic membrane fabricated by wet etching process and a multi-wall carbon nanotube array cathode in the micro-vacuum cavity. The prototype pressure sensor has a measured sensitivity of about 0.16-0.78 nA/Pa(101-550 kPa). The work suggests the potential use of CNT-based field emitters in microsensors such as accelerometers and tactile sensors.

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DO - 10.1049/el:20051360

M3 - 文章

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JO - Electronics Letters

JF - Electronics Letters

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Research on carbon nanotube array field emission pressure sensors

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