reparation and performance of micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP ferroelectric thin film arrays

Feng Juan Miao, Bai Rui Tao, Zhi Gao Hu, Jun Hao Chu

Research output: Contribution to journalArticlepeer-review

Abstract

The micro/nano-scale Bi3.15Nd0.85Ti3O12/Si-MCP (BNT/Si-MCP) ferroelectric thin film arrays were fabricated successfully by the sol-gel, spin-coating and pumping filtration methods. Precursors of BNT were coated on the inner wall of Si-MCP. Bi3.15Nd0.85Ti3O12 thin film supported by Si-MCP were prepared via annealing in oxygen atmosphere at 600°C, 650°C, 700°C and 750°C, respectively. The ferroelectric properties and microstructures of BNT/Si-MCP film arrays were characterized. The results show that with the increase of annealing temperature, the size of BNT grain localized on the inner wall of Si-MCP increases, the uniformity of the surface and the degree of orientation along the c-axis increase, too. The largest remanent polarization (93.8 μC/cm2) and lowest leakage current of the micro/nano-scale BNT/Si-MCP arrays were obtained annealing at 750°C.

Original languageEnglish
Pages (from-to)139-142+148
JournalHongwai Yu Haomibo Xuebao/Journal of Infrared and Millimeter Waves
Volume33
Issue number2
DOIs
StatePublished - Apr 2014

Keywords

  • BNT
  • Ferroelectric films
  • Micro-nano film arrays
  • Si MCP

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