@inproceedings{6bf3e70a0560460eba922cd0ae239d9a,
title = "Reliability investigation of flexible graphene-based actuator",
abstract = "Graphene is a typical two-dimensional material which has fascinating electrical, mechanical, and optical properties. In particular, graphene-based smart MEMS/NEMS devices can automatically respond to external electric stimulation and convert to mechanical movement. Actuator is one of the most potential applications of graphene-based MEMS. However, its reliability investigation has rarely been reported. Here we report the failure mechanism of a bimorph actuator fabricated by reduced graphene (RGO) and graphene oxide (GO). Our findings pave a way to the fundamental understanding of reliability issues on graphene-based actuators.",
author = "Liu, \{S. B.\} and W. Wang and Yuan, \{T. Y.\} and Zhang, \{Y. Y.\} and N. Zhong and Qi, \{R. J.\} and R. Huang and J. Zhang and X. Wu",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015 ; Conference date: 29-06-2015 Through 02-07-2015",
year = "2015",
month = aug,
day = "25",
doi = "10.1109/IPFA.2015.7224413",
language = "英语",
series = "Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "411--414",
booktitle = "Proceedings of the 22nd International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2015",
address = "美国",
}