Realization of integrated narrow bandpass filters in the infrared region

Shao Wei Wang*, Dingquan Liu, Bin Lin, Xiaoshuang Chen, Zhifeng Li, Yan Shi, Wei Wang, Wei Lu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 um in this case. The relative full width at half maximum (FWHM) δλ/λ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.

Original languageEnglish
Pages (from-to)1677-1683
Number of pages7
JournalInternational Journal of Infrared and Millimeter Waves
Volume25
Issue number11
DOIs
StatePublished - Nov 2004
Externally publishedYes

Keywords

  • Array
  • Filter
  • Integrate
  • Narrow bandpass

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