Abstract
We demonstrated a high-efficiency technique for the integration of narrow bandpass filters (NBPFs). A filter array integrated with 16 filters on a single substrate has been fabricated by only twice depositing processes. The bandpass of the filters can be tuned widely and range from 2.295 to 2.967 um in this case. The relative full width at half maximum (FWHM) δλ/λ of each filter is less than 0.7%. And the intensity of the bandpass is up to 41.3%.
| Original language | English |
|---|---|
| Pages (from-to) | 1677-1683 |
| Number of pages | 7 |
| Journal | International Journal of Infrared and Millimeter Waves |
| Volume | 25 |
| Issue number | 11 |
| DOIs | |
| State | Published - Nov 2004 |
| Externally published | Yes |
Keywords
- Array
- Filter
- Integrate
- Narrow bandpass