Rapid prototyping of three-dimensional microfluidic mixers in glass by femtosecond laser direct writing

Yang Liao, Jiangxin Song, En Li, Yong Luo, Yinglong Shen, Danping Chen, Ya Cheng, Zhizhan Xu, Koji Sugioka, Katsumi Midorikawa

Research output: Contribution to journalArticlepeer-review

223 Scopus citations

Abstract

The creation of complex three-dimensional (3D) microfluidic systems has attracted significant attention from both scientific and applied research communities. However, it is still a formidable challenge to build 3D microfluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. Here, we demonstrate rapid fabrication of high-aspect-ratio microfluidic channels with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate a 3D passive microfluidic mixer and characterize its functionalities. This technology will enable rapid construction of complex 3D microfluidic devices for a wide array of lab-on-a-chip applications.

Original languageEnglish
Pages (from-to)746-749
Number of pages4
JournalLab on a Chip
Volume12
Issue number4
DOIs
StatePublished - 21 Feb 2012
Externally publishedYes

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