Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

B. K. Tay; X. Shi; H. S. Tan; H. S. Yang; Z. Sun

doi:10.1016/S0257-8972(98)00475-7

Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

B. K. Tay
, X. Shi
, H. S. Tan
, H. S. Yang
, Z. Sun

Unknown

Research output: Contribution to journal › Article › peer-review

138 Scopus citations

Abstract

Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp³/sp² bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp³ fraction.

Original language	English
Pages (from-to)	155-158
Number of pages	4
Journal	Surface and Coatings Technology
Volume	105
Issue number	1-2
DOIs	https://doi.org/10.1016/S0257-8972(98)00475-7
State	Published - 5 Jun 1998
Externally published	Yes

Keywords

Cathodic vacuum arc
Raman studies
Tetrahedral amorphous carbon films

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10.1016/S0257-8972(98)00475-7

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abstract = "Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.",

keywords = "Cathodic vacuum arc, Raman studies, Tetrahedral amorphous carbon films",

author = "Tay, \{B. K.\} and X. Shi and Tan, \{H. S.\} and Yang, \{H. S.\} and Z. Sun",

year = "1998",

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T1 - Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

AU - Tay, B. K.

AU - Shi, X.

AU - Tan, H. S.

AU - Yang, H. S.

AU - Sun, Z.

PY - 1998/6/5

Y1 - 1998/6/5

N2 - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

AB - Raman spectra of tetrahedral amorphous carbon (ta-C) films have been obtained as a function of impinging carbon ion energy. In order to analyze the spectra quantitatively, the Raman spectra were fitted using a least-squares computer program. The relative Raman intensity is found to decrease with increasing sp3/sp2 bonding ratio in the films. In particular, the parameters from the fits show a strong correlation between the relative intensity ratio and the sp3 fraction.

KW - Cathodic vacuum arc

KW - Raman studies

KW - Tetrahedral amorphous carbon films

UR - https://www.scopus.com/pages/publications/0032486037

U2 - 10.1016/S0257-8972(98)00475-7

DO - 10.1016/S0257-8972(98)00475-7

M3 - 文章

AN - SCOPUS:0032486037

SN - 0257-8972

VL - 105

SP - 155

EP - 158

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 1-2

ER -

Raman studies of tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc

Abstract

Keywords

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