TY - JOUR
T1 - Pulsed laser deposition of pyroelectric PCLT thin films using a ceramic/metal target
AU - Zheng, Lirong
AU - Yang, Pingxiong
AU - Xu, W. Ping
AU - Lin, Chenglu
AU - Wu, Wenbiao
AU - Okuyama, Masanori
PY - 1998
Y1 - 1998
N2 - In this paper, we report the preparation and characteristics of Ca and La doped PbTiC3 (PCLT) thin film on Pt/Ti/SiO2/Si substrate by laser ablating a ceramic/metal target. The deposited film is polycrystalline and exhibits good ferroelectric hysteresis loop, low leakage, and good pyroelectric properties. The pyroelectric coefficient of the film is high as 8.81 × 10-8 C/cm2K and the effective dielectric constant of the film is about 352. So the figure of merit of the film is high as 0.78×10-10 Ccm/J, indicating that PCLT is a promising material for pyroelectric application.
AB - In this paper, we report the preparation and characteristics of Ca and La doped PbTiC3 (PCLT) thin film on Pt/Ti/SiO2/Si substrate by laser ablating a ceramic/metal target. The deposited film is polycrystalline and exhibits good ferroelectric hysteresis loop, low leakage, and good pyroelectric properties. The pyroelectric coefficient of the film is high as 8.81 × 10-8 C/cm2K and the effective dielectric constant of the film is about 352. So the figure of merit of the film is high as 0.78×10-10 Ccm/J, indicating that PCLT is a promising material for pyroelectric application.
KW - Ceramic/metal target
KW - Pulsed laser deposition
KW - Pyroelectric thin film
UR - https://www.scopus.com/pages/publications/0032316571
U2 - 10.1080/10584589808238770
DO - 10.1080/10584589808238770
M3 - 文章
AN - SCOPUS:0032316571
SN - 1058-4587
VL - 20
SP - 73
EP - 78
JO - Integrated Ferroelectrics
JF - Integrated Ferroelectrics
IS - 1-4
ER -