Abstract
The phenylcarbyne polymer possesses a diamond-like structure. Because of its special structure, this polymer can be converted into diamond-like carbon phases at atmospheric pressure by thermal decomposition. In this article, we report on the growth of hydrogenated amorphous carbon films (a-C:H) films by pulsed laser (KrF excimer, λ = 248 nm) ablation of a phenylcarbyne polymer target under vacuum. a-C:H films were deposited with various laser fluences and at different substrate temperatures. Chemical and structural characteristics of these films were analyzed using X-ray-excited Auger electron spectroscopy (XAES), photoelectron loss spectroscopy (PELS), and Raman spectroscopy. It was found that the fourfold-coordinated component increases with laser fluence at 80 °C or increases with temperature increasing from 25 °C to 60 °C at a fluence of 1×109 W/cm2. When the deposition temperature is increased from 60 °C to 200 °C at a fluence of 1×109 W/cm2, the graphitic component increases. The variation in chemical structures of these films is explained in terms of the changes in the fraction of sp2-bonded clusters and changes in the termination of the graphitic clusters and sp3-bonded networks by hydrogen in the a-C:H films.
| Original language | English |
|---|---|
| Pages (from-to) | 478-486 |
| Number of pages | 9 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3933 |
| State | Published - 2000 |
| Externally published | Yes |
| Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA Duration: 24 Jan 2000 → 26 Jan 2000 |