Pulsed laser deposited zinc oxide films for surface acoustic wave applications

Y. S. Liu; L. W. Wang; W. Q. Li; J. P. Huang; C. L. Lin

Pulsed laser deposited zinc oxide films for surface acoustic wave applications

Y. S. Liu, L. W. Wang, W. Q. Li, J. P. Huang, C. L. Lin

CAS - Shanghai Institute of Microsystem and Information Technology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (10⁷ Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

Original language	English
Pages (from-to)	78-79+90
Journal	Gongneng Cailiao/Journal of Functional Materials
Volume	32
Issue number	1
State	Published - Feb 2001
Externally published	Yes

Keywords

PLD
Piezoelectricity
SAW
ZnO

Cite this

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title = "Pulsed laser deposited zinc oxide films for surface acoustic wave applications",

abstract = "Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.",

keywords = "PLD, Piezoelectricity, SAW, ZnO",

author = "Liu, \{Y. S.\} and Wang, \{L. W.\} and Li, \{W. Q.\} and Huang, \{J. P.\} and Lin, \{C. L.\}",

year = "2001",

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journal = "Gongneng Cailiao/Journal of Functional Materials",

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T1 - Pulsed laser deposited zinc oxide films for surface acoustic wave applications

AU - Liu, Y. S.

AU - Wang, L. W.

AU - Li, W. Q.

AU - Huang, J. P.

AU - Lin, C. L.

PY - 2001/2

Y1 - 2001/2

N2 - Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

AB - Zinc oxide (ZnO) thin films were deposited on Si (100) by pulsed laser deposition (PLD). XRD, TEM and AFM exhibited the ZnO films were highly c-axis oriented with smooth surface. High resistivity (107 Ω·cm) of the films could be achieved by varying deposition ambient atmosphere or annealing in pure oxygen at high temperature. The results showed that the ZnO films deposited by PLD meet the demands for surface acoustic wave (SAW) devices.

KW - PLD

KW - Piezoelectricity

KW - SAW

KW - ZnO

UR - https://www.scopus.com/pages/publications/0035242458

M3 - 文章

AN - SCOPUS:0035242458

SN - 1001-9731

VL - 32

SP - 78-79+90

JO - Gongneng Cailiao/Journal of Functional Materials

JF - Gongneng Cailiao/Journal of Functional Materials

IS - 1

ER -

Pulsed laser deposited zinc oxide films for surface acoustic wave applications

Abstract

Keywords

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