TY - JOUR
T1 - Properties of SrBi2Ta0.8Nb1.2O9 thin films deposited by plasma-assisted pulsed-laser deposition
AU - Yang, Pingxiong
AU - Deng, Hongmei
AU - Shi, Meirong
AU - Tong, Ziyang
PY - 2007
Y1 - 2007
N2 - A significant effect of the introduction of O2 -plasma discharge during pulsed laser ablative deposition of Sr Bi2 Ta0.8 Nb1.2 O9 (SBTN) films on improving the crystallite orientation, ferroelectric, and optical properties has been described. Plasma-excitation potential, applied at an auxiliary-ring electrode placed near the substrate, has a profound effect on surface morphology, crystallite orientation, remnant polarization, and optical constants. Compared with no plasma assist, the films have an additional strong (008) and (200) and an approximate 32% multiplication in remnant polarization. The refractive index (n∼2.27) with plasma is greater than the corresponding values (n∼2.16) of no plasma. Clearly, the presence of O2 plasma assists in the growth of SBTN films, which display much improved ferroelectric and optical properties.
AB - A significant effect of the introduction of O2 -plasma discharge during pulsed laser ablative deposition of Sr Bi2 Ta0.8 Nb1.2 O9 (SBTN) films on improving the crystallite orientation, ferroelectric, and optical properties has been described. Plasma-excitation potential, applied at an auxiliary-ring electrode placed near the substrate, has a profound effect on surface morphology, crystallite orientation, remnant polarization, and optical constants. Compared with no plasma assist, the films have an additional strong (008) and (200) and an approximate 32% multiplication in remnant polarization. The refractive index (n∼2.27) with plasma is greater than the corresponding values (n∼2.16) of no plasma. Clearly, the presence of O2 plasma assists in the growth of SBTN films, which display much improved ferroelectric and optical properties.
UR - https://www.scopus.com/pages/publications/33846231065
U2 - 10.1116/1.2404687
DO - 10.1116/1.2404687
M3 - 文章
AN - SCOPUS:33846231065
SN - 0734-2101
VL - 25
SP - 148
EP - 152
JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
IS - 1
ER -