Preparation of ZnMnO by ion implantation and its spectral characterization

Hong Mei Zhong; Xiao Shuang Chen; Jin Bin Wang; Chang Sheng Xia; Shao Wei Wang; Zhi Feng Li; Wen Lan Xu; Wei Lu

doi:10.7498/aps.55.2073

Preparation of ZnMnO by ion implantation and its spectral characterization

Hong Mei Zhong^*
, Xiao Shuang Chen
, Jin Bin Wang
, Chang Sheng Xia
, Shao Wei Wang
, Zhi Feng Li
, Wen Lan Xu
, Wei Lu

^*Corresponding author for this work

CAS - Shanghai Institute of Technical Physics

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

This paper reports the fabrication of ZnMnO semiconductor by high-dose Mn implantion. We studied the influence of implantation dose and annealing on its optical properties. The broad band at 575 cm_-1 in Raman spectrum is attributed to defects related to high-dose Mn implantation. The vibration modes at 528 cm^-1 are considered to be associated with Mn impurities. Room temperature photoluminescence spectra show that the high-dose Mn implantation can enhance the intensity in visible band.

Original language	English
Pages (from-to)	2073-2077
Number of pages	5
Journal	Wuli Xuebao/Acta Physica Sinica
Volume	55
Issue number	4
DOIs	https://doi.org/10.7498/aps.55.2073
State	Published - Apr 2006
Externally published	Yes

Keywords

Ion implantation
Raman spectrum
Room photoluminescence properties
ZnMnO

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10.7498/aps.55.2073

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title = "Preparation of ZnMnO by ion implantation and its spectral characterization",

abstract = "This paper reports the fabrication of ZnMnO semiconductor by high-dose Mn implantion. We studied the influence of implantation dose and annealing on its optical properties. The broad band at 575 cm-1 in Raman spectrum is attributed to defects related to high-dose Mn implantation. The vibration modes at 528 cm-1 are considered to be associated with Mn impurities. Room temperature photoluminescence spectra show that the high-dose Mn implantation can enhance the intensity in visible band.",

keywords = "Ion implantation, Raman spectrum, Room photoluminescence properties, ZnMnO",

author = "Zhong, \{Hong Mei\} and Chen, \{Xiao Shuang\} and Wang, \{Jin Bin\} and Xia, \{Chang Sheng\} and Wang, \{Shao Wei\} and Li, \{Zhi Feng\} and Xu, \{Wen Lan\} and Wei Lu",

year = "2006",

month = apr,

doi = "10.7498/aps.55.2073",

language = "英语",

volume = "55",

pages = "2073--2077",

journal = "Wuli Xuebao/Acta Physica Sinica",

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TY - JOUR

T1 - Preparation of ZnMnO by ion implantation and its spectral characterization

AU - Zhong, Hong Mei

AU - Chen, Xiao Shuang

AU - Wang, Jin Bin

AU - Xia, Chang Sheng

AU - Wang, Shao Wei

AU - Li, Zhi Feng

AU - Xu, Wen Lan

AU - Lu, Wei

PY - 2006/4

Y1 - 2006/4

N2 - This paper reports the fabrication of ZnMnO semiconductor by high-dose Mn implantion. We studied the influence of implantation dose and annealing on its optical properties. The broad band at 575 cm-1 in Raman spectrum is attributed to defects related to high-dose Mn implantation. The vibration modes at 528 cm-1 are considered to be associated with Mn impurities. Room temperature photoluminescence spectra show that the high-dose Mn implantation can enhance the intensity in visible band.

AB - This paper reports the fabrication of ZnMnO semiconductor by high-dose Mn implantion. We studied the influence of implantation dose and annealing on its optical properties. The broad band at 575 cm-1 in Raman spectrum is attributed to defects related to high-dose Mn implantation. The vibration modes at 528 cm-1 are considered to be associated with Mn impurities. Room temperature photoluminescence spectra show that the high-dose Mn implantation can enhance the intensity in visible band.

KW - Ion implantation

KW - Raman spectrum

KW - Room photoluminescence properties

KW - ZnMnO

UR - https://www.scopus.com/pages/publications/33646382118

U2 - 10.7498/aps.55.2073

DO - 10.7498/aps.55.2073

M3 - 文章

AN - SCOPUS:33646382118

SN - 1000-3290

VL - 55

SP - 2073

EP - 2077

JO - Wuli Xuebao/Acta Physica Sinica

JF - Wuli Xuebao/Acta Physica Sinica

IS - 4

ER -

Preparation of ZnMnO by ion implantation and its spectral characterization

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Keywords

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