Preparation of solid electrolyte PVDF on MoS2in silicon MCP for three-dimensional Li ion microbatteries

Huayan Zhang, Tao Liu, Fei Wang, Lianwei Wang, Zhouguang Lu, C. Y. Chung, Paul K. Chu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report the preparation of MoS2 anode and solid electrolyte PVDF for the construction of three-dimensional (3D) Li-ion microbatteries based on silicon MCP. The MoS2 layer anode electrode on the Ni layer exhibits a higher specific capacity compared to other anode materials. The outstanding electrochemical property of the MoS2 layer makes it promising anode materials. The PVDF as the electrolyte matrix is introduced into the MCP arrays by repetitive pumping and spinning. The smooth and conformal membrane prepared forms the basis of the 3D Li-ion microbattery.

Original languageEnglish
Title of host publicationICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings
Pages2001-2003
Number of pages3
DOIs
StatePublished - 2010
Event2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China
Duration: 1 Nov 20104 Nov 2010

Publication series

NameICSICT-2010 - 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

Conference2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology
Country/TerritoryChina
CityShanghai
Period1/11/104/11/10

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