Preparation of Ni current collector and MoS2 cathode in three-dimensional Li ion microbattery based on silicon MCP

Tao Liu; Li Sun; Jia Lai; Lianwei Wang; Zhouguang Lu; Jonathan C.Y. Chung; Paul K. Chu

doi:10.1109/NEMS.2010.5592160

Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP

Tao Liu, Li Sun, Jia Lai, Lianwei Wang^*, Zhouguang Lu, Jonathan C.Y. Chung, Paul K. Chu

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silicon MCP as a current collector by electroless deposition. A molybdenum sulfide layer is electro-deposited onto the nickel coated silicon MCP as a cathode. The as-deposited molybdenum sulfide film is amorphous whereas the film annealed at a high temperature appears to be highly textured.

Original language	English
Title of host publication	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Pages	118-121
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2010.5592160
State	Published - 2010
Event	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 - Xiamen, China Duration: 20 Jan 2010 → 23 Jan 2010

Publication series

Name	2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010

Conference

Conference	5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010
Country/Territory	China
City	Xiamen
Period	20/01/10 → 23/01/10

Keywords

Microbattery
Microchannel plate
Molybdenum sulfide
Nickel

Access to Document

10.1109/NEMS.2010.5592160

Cite this

Liu, T., Sun, L., Lai, J., Wang, L., Lu, Z., Chung, J. C. Y., & Chu, P. K. (2010). Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 (pp. 118-121). Article 5592160 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). https://doi.org/10.1109/NEMS.2010.5592160

Liu, Tao ; Sun, Li ; Lai, Jia et al. / Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP. 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. pp. 118-121 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

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title = "Preparation of Ni current collector and MoS2 cathode in three-dimensional Li ion microbattery based on silicon MCP",

abstract = "Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silicon MCP as a current collector by electroless deposition. A molybdenum sulfide layer is electro-deposited onto the nickel coated silicon MCP as a cathode. The as-deposited molybdenum sulfide film is amorphous whereas the film annealed at a high temperature appears to be highly textured.",

keywords = "Microbattery, Microchannel plate, Molybdenum sulfide, Nickel",

author = "Tao Liu and Li Sun and Jia Lai and Lianwei Wang and Zhouguang Lu and Chung, \{Jonathan C.Y.\} and Chu, \{Paul K.\}",

year = "2010",

doi = "10.1109/NEMS.2010.5592160",

language = "英语",

isbn = "9781424465439",

series = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

pages = "118--121",

booktitle = "2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010",

note = "5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010 ; Conference date: 20-01-2010 Through 23-01-2010",

}

Liu, T, Sun, L, Lai, J, Wang, L, Lu, Z, Chung, JCY & Chu, PK 2010, Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP. in 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010., 5592160, 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, pp. 118-121, 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, 20/01/10. https://doi.org/10.1109/NEMS.2010.5592160

Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP. / Liu, Tao; Sun, Li; Lai, Jia et al.
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 118-121 5592160 (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Liu, Tao

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AU - Chung, Jonathan C.Y.

AU - Chu, Paul K.

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AB - Three-dimensional Li ion microbatteries are known for their high surface area which leads to high current and capacity compared to traditional planar batteries. This paper describes economical approaches to prepare half 3D microbatteries based on silicon microchannel plates (MCP). The high aspect ratio silicon MCP is formed by electrochemical etching and a nickel layer is coated onto the silicon MCP as a current collector by electroless deposition. A molybdenum sulfide layer is electro-deposited onto the nickel coated silicon MCP as a cathode. The as-deposited molybdenum sulfide film is amorphous whereas the film annealed at a high temperature appears to be highly textured.

KW - Microbattery

KW - Microchannel plate

KW - Molybdenum sulfide

KW - Nickel

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Liu T, Sun L, Lai J, Wang L, Lu Z, Chung JCY et al. Preparation of Ni current collector and MoS₂ cathode in three-dimensional Li ion microbattery based on silicon MCP. In 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010. 2010. p. 118-121. 5592160. (2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010). doi: 10.1109/NEMS.2010.5592160