Preparation of indium tin oxide thin films without external heating for application in solar cells

J. B. Chu; S. M. Huang; H. B. Zhu; X. B. Xu; Z. Sun; Y. W. Chen; F. Q. Huang

doi:10.1016/j.jnoncrysol.2008.08.011

Preparation of indium tin oxide thin films without external heating for application in solar cells

J. B. Chu, S. M. Huang, H. B. Zhu, X. B. Xu, Z. Sun, Y. W. Chen, F. Q. Huang

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

Indium tin oxide (ITO) films were grown without external heating in an ambient of pure argon by RF-magnetron sputtering method. The influence of argon ambient pressure on the electro-optical properties of as-deposited ITO films was investigated. The morphology, structural and optical properties of ITO films were examined and characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and UV-VIS transmission spectroscopy. The deposited ITO films with a thickness of 300 nm show a high transparency between 80% and 90% in the visible spectrum and 14-120 Ω/□ sheet resistance under different conditions. The ITO films deposited in the optimum argon ambient pressure were used as transparent electrical contacts for thin film Cu(In,Ga)Se₂ (CIGS) solar cells. CIGS solar cells with efficiencies of the order of 7.0% were produced without antireflective films. The results have demonstrated that the developed ITO deposition technology has potential applications in thin film solar cells.

Original language	English
Pages (from-to)	5480-5484
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	354
Issue number	52-54
DOIs	https://doi.org/10.1016/j.jnoncrysol.2008.08.011
State	Published - 15 Dec 2008

Keywords

Indium tin oxide and other transparent conductors
Photovoltaics
Sputtering

Access to Document

10.1016/j.jnoncrysol.2008.08.011

Cite this

@article{a89a8ab8b35c48ec82b05fe3612e05f5,

title = "Preparation of indium tin oxide thin films without external heating for application in solar cells",

abstract = "Indium tin oxide (ITO) films were grown without external heating in an ambient of pure argon by RF-magnetron sputtering method. The influence of argon ambient pressure on the electro-optical properties of as-deposited ITO films was investigated. The morphology, structural and optical properties of ITO films were examined and characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and UV-VIS transmission spectroscopy. The deposited ITO films with a thickness of 300 nm show a high transparency between 80\% and 90\% in the visible spectrum and 14-120 Ω/□ sheet resistance under different conditions. The ITO films deposited in the optimum argon ambient pressure were used as transparent electrical contacts for thin film Cu(In,Ga)Se2 (CIGS) solar cells. CIGS solar cells with efficiencies of the order of 7.0\% were produced without antireflective films. The results have demonstrated that the developed ITO deposition technology has potential applications in thin film solar cells.",

keywords = "Indium tin oxide and other transparent conductors, Photovoltaics, Sputtering",

author = "Chu, \{J. B.\} and Huang, \{S. M.\} and Zhu, \{H. B.\} and Xu, \{X. B.\} and Z. Sun and Chen, \{Y. W.\} and Huang, \{F. Q.\}",

year = "2008",

month = dec,

day = "15",

doi = "10.1016/j.jnoncrysol.2008.08.011",

language = "英语",

volume = "354",

pages = "5480--5484",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

number = "52-54",

}

TY - JOUR

T1 - Preparation of indium tin oxide thin films without external heating for application in solar cells

AU - Chu, J. B.

AU - Huang, S. M.

AU - Zhu, H. B.

AU - Xu, X. B.

AU - Sun, Z.

AU - Chen, Y. W.

AU - Huang, F. Q.

PY - 2008/12/15

Y1 - 2008/12/15

N2 - Indium tin oxide (ITO) films were grown without external heating in an ambient of pure argon by RF-magnetron sputtering method. The influence of argon ambient pressure on the electro-optical properties of as-deposited ITO films was investigated. The morphology, structural and optical properties of ITO films were examined and characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and UV-VIS transmission spectroscopy. The deposited ITO films with a thickness of 300 nm show a high transparency between 80% and 90% in the visible spectrum and 14-120 Ω/□ sheet resistance under different conditions. The ITO films deposited in the optimum argon ambient pressure were used as transparent electrical contacts for thin film Cu(In,Ga)Se2 (CIGS) solar cells. CIGS solar cells with efficiencies of the order of 7.0% were produced without antireflective films. The results have demonstrated that the developed ITO deposition technology has potential applications in thin film solar cells.

AB - Indium tin oxide (ITO) films were grown without external heating in an ambient of pure argon by RF-magnetron sputtering method. The influence of argon ambient pressure on the electro-optical properties of as-deposited ITO films was investigated. The morphology, structural and optical properties of ITO films were examined and characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM) and UV-VIS transmission spectroscopy. The deposited ITO films with a thickness of 300 nm show a high transparency between 80% and 90% in the visible spectrum and 14-120 Ω/□ sheet resistance under different conditions. The ITO films deposited in the optimum argon ambient pressure were used as transparent electrical contacts for thin film Cu(In,Ga)Se2 (CIGS) solar cells. CIGS solar cells with efficiencies of the order of 7.0% were produced without antireflective films. The results have demonstrated that the developed ITO deposition technology has potential applications in thin film solar cells.

KW - Indium tin oxide and other transparent conductors

KW - Photovoltaics

KW - Sputtering

UR - https://www.scopus.com/pages/publications/55649100709

U2 - 10.1016/j.jnoncrysol.2008.08.011

DO - 10.1016/j.jnoncrysol.2008.08.011

M3 - 文章

AN - SCOPUS:55649100709

SN - 0022-3093

VL - 354

SP - 5480

EP - 5484

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - 52-54

ER -

Preparation of indium tin oxide thin films without external heating for application in solar cells

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this