Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

S. H. Hu; X. J. Meng; G. J. Hu; J. H. Chu; N. Dai; L. Xu; L. Y. Liu; D. X. Li

doi:10.1063/1.1738178

Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr_0.5Ti_0.5)O₃ thick films

S. H. Hu, X. J. Meng, G. J. Hu, J. H. Chu, N. Dai, L. Xu, L. Y. Liu, D. X. Li

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The growth of metal alkoxide solution-derived Pb(Zr_0.5Ti _0.5)O₃ (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO ₃ substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

Original language	English
Pages (from-to)	3609-3611
Number of pages	3
Journal	Applied Physics Letters
Volume	84
Issue number	18
DOIs	https://doi.org/10.1063/1.1738178
State	Published - 3 May 2004
Externally published	Yes

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title = "Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films",

abstract = "The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.",

author = "Hu, \{S. H.\} and Meng, \{X. J.\} and Hu, \{G. J.\} and Chu, \{J. H.\} and N. Dai and L. Xu and Liu, \{L. Y.\} and Li, \{D. X.\}",

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doi = "10.1063/1.1738178",

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pages = "3609--3611",

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T1 - Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr0.5Ti0.5)O3 thick films

AU - Hu, S. H.

AU - Meng, X. J.

AU - Hu, G. J.

AU - Chu, J. H.

AU - Dai, N.

AU - Xu, L.

AU - Liu, L. Y.

AU - Li, D. X.

PY - 2004/5/3

Y1 - 2004/5/3

N2 - The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

AB - The growth of metal alkoxide solution-derived Pb(Zr0.5Ti 0.5)O3 (PZT) thick films with thickness of 1.5 and 3.7 μm was investigated. The PZT films were prepared on single-crystal SrTiO 3 substrate by sol-gel process and desired thickness was obtained using multiple steps of spin-coating and annealing process. The structure of the films were investigated by X-ray diffraction and its optical waveguide property was studied using prism-film coupling with a He-Ne laser. It was observed from atomic force microscopy that a crack-free and smooth surface was possessed by the PZT films.

UR - https://www.scopus.com/pages/publications/2542466861

U2 - 10.1063/1.1738178

DO - 10.1063/1.1738178

M3 - 文章

AN - SCOPUS:2542466861

SN - 0003-6951

VL - 84

SP - 3609

EP - 3611

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Preparation and optical waveguide property of metal alkoxide solution-derived Pb(Zr_0.5Ti_0.5)O₃ thick films

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