Porous silicon microtube structures induced by anisotropic strain

S. H. Xu; L. W. Wang

doi:10.1063/1.3243231

Porous silicon microtube structures induced by anisotropic strain

S. H. Xu, L. W. Wang

School of Physics and Electronic Science

East China Normal University

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

The porous silicon tube structures, with a diameter of 20 μm, were formed by pulsed anodization process. A phenomenological mechanical model was used to explain the formation mechanism. The agreement between the experimental data and theoretical results indicated that the stresses in parallel and perpendicular directions of the nanocolumnar structure may cause the crack and curve of the porous silicon layer to form the tube structures.

Original language	English
Article number	073516
Journal	Journal of Applied Physics
Volume	106
Issue number	7
DOIs	https://doi.org/10.1063/1.3243231
State	Published - 2009

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10.1063/1.3243231

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title = "Porous silicon microtube structures induced by anisotropic strain",

abstract = "The porous silicon tube structures, with a diameter of 20 μm, were formed by pulsed anodization process. A phenomenological mechanical model was used to explain the formation mechanism. The agreement between the experimental data and theoretical results indicated that the stresses in parallel and perpendicular directions of the nanocolumnar structure may cause the crack and curve of the porous silicon layer to form the tube structures.",

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AU - Xu, S. H.

AU - Wang, L. W.

PY - 2009

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AB - The porous silicon tube structures, with a diameter of 20 μm, were formed by pulsed anodization process. A phenomenological mechanical model was used to explain the formation mechanism. The agreement between the experimental data and theoretical results indicated that the stresses in parallel and perpendicular directions of the nanocolumnar structure may cause the crack and curve of the porous silicon layer to form the tube structures.

UR - https://www.scopus.com/pages/publications/70350123083

U2 - 10.1063/1.3243231

DO - 10.1063/1.3243231

M3 - 文章

AN - SCOPUS:70350123083

SN - 0021-8979

VL - 106

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

M1 - 073516

ER -

Porous silicon microtube structures induced by anisotropic strain

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