Polymer interconnections for 3D-chip stacking technology: Directional volume patterning of flexible substrates with conducting polymer wires

C. Videlot, J. Ackermann, F. Fages, T. N. Nguyen, L. Wang, P. M. Sarro, D. Crawley, K. Nikolić, M. Forshaw

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Abstract

Research in 3D interconnection technology involves the functional modeling of complex biological processing structures with high-density 3D connections (such as the visual cortex). We propose a simple multi-chip stack structure, with through-chip connections and conducting polymer wires between layers. Self-assembled polymer wires based on polypyrrole have been produced by a directional electropolymerization process which permits the directional volume patterning of flexible substrates such as polycarbonate filtration membranes and gel layers. We have designed and fabricated successfully a two-chip stack with a perfect vertical electrical transfer between layers without any appearance of cross-talk. The measured values of conductivity for the polymer-based wires were as high as 0.5 S cm-1. Furthermore we could demonstrate the feasibility of a three-chip stack by using two intermediate polymer-based patterned layers and a special middle chip with through-chip metal connections.

Original languageEnglish
Pages (from-to)1618-1624
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number12
DOIs
StatePublished - Dec 2004
Externally publishedYes

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