Photon-counting laser interferometer for absolute distance measurement on rough surface

Chengkai Pang; Di Wu; Haotian Shi; Xiuliang Chen; Lei Yang; Zhaohui Li; Guang Wu

doi:10.1063/1.5109913

Photon-counting laser interferometer for absolute distance measurement on rough surface

Chengkai Pang, Di Wu, Haotian Shi, Xiuliang Chen, Lei Yang, Zhaohui Li, Guang Wu

Institute for Advanced Study in Precision Spectroscopy

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of L_g and L_r were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.

Original language	English
Article number	083101
Journal	Review of Scientific Instruments
Volume	90
Issue number	8
DOIs	https://doi.org/10.1063/1.5109913
State	Published - 1 Aug 2019

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title = "Photon-counting laser interferometer for absolute distance measurement on rough surface",

abstract = "We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of Lg and Lr were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.",

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T1 - Photon-counting laser interferometer for absolute distance measurement on rough surface

AU - Pang, Chengkai

AU - Wu, Di

AU - Shi, Haotian

AU - Chen, Xiuliang

AU - Yang, Lei

AU - Li, Zhaohui

AU - Wu, Guang

PY - 2019/8/1

Y1 - 2019/8/1

N2 - We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of Lg and Lr were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.

AB - We designed a dual-wavelength photon-counting laser interferometer for absolute distance measurement of noncooperative targets. The weak optical interference on the rough surface was measured by a single-photon detector. The range of nonambiguity of the dual-wavelength interferometer was less than 1.2 μm, as the maximum errors of Lg and Lr were 7.8 nm and 9.1 nm caused by the photon-counting measurement and the frequency shift of the two unlocked lasers. We integrated laser triangulation into the interferometer as a coarse measurement, thus increasing the range of nonambiguity to 6.5 mm. As a result, a measurement standard deviation of ∼18 nm was achieved within a range of 1.1 mm in the experiment.

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Photon-counting laser interferometer for absolute distance measurement on rough surface

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