Photoluminescence properties of Er doped into C-rich SiC nanoparticle films

Shiyong Huang; S. Xu; Jidong Long; Z. Sun; X. Z. Wang; Y. W. Chen; T. Chen; C. Ni; Z. J. Zhang; L. L. Wang; X. D. Li; P. S. Guo; W. X. Que

doi:10.1142/S0218625X06007834

Photoluminescence properties of Er doped into C-rich SiC nanoparticle films

Shiyong Huang^*
, S. Xu
, Jidong Long
, Z. Sun
, X. Z. Wang
, Y. W. Chen
, T. Chen
, C. Ni
, Z. J. Zhang
, L. L. Wang
, X. D. Li
, P. S. Guo
, W. X. Que

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen. Surface morphology and photoluminescence (PL) properties of them were measured by field-emission scanning electron microscope and Raman spectroscopy. The peak position, intensity, and the full width at half maximum (FWHM) of PL spectra were relevant with Er doping levels and deposition conditions.

Original language	English
Pages (from-to)	123-126
Number of pages	4
Journal	Surface Review and Letters
Volume	13
Issue number	1
DOIs	https://doi.org/10.1142/S0218625X06007834
State	Published - Feb 2006

Keywords

Co-sputtering
Er-doped
Nanoparticle
Photoluminescence

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10.1142/S0218625X06007834

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title = "Photoluminescence properties of Er doped into C-rich SiC nanoparticle films",

abstract = "Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen. Surface morphology and photoluminescence (PL) properties of them were measured by field-emission scanning electron microscope and Raman spectroscopy. The peak position, intensity, and the full width at half maximum (FWHM) of PL spectra were relevant with Er doping levels and deposition conditions.",

keywords = "Co-sputtering, Er-doped, Nanoparticle, Photoluminescence",

author = "Shiyong Huang and S. Xu and Jidong Long and Z. Sun and Wang, \{X. Z.\} and Chen, \{Y. W.\} and T. Chen and C. Ni and Zhang, \{Z. J.\} and Wang, \{L. L.\} and Li, \{X. D.\} and Guo, \{P. S.\} and Que, \{W. X.\}",

year = "2006",

month = feb,

doi = "10.1142/S0218625X06007834",

language = "英语",

volume = "13",

pages = "123--126",

journal = "Surface Review and Letters",

issn = "0218-625X",

publisher = "World Scientific Publishing Co. Pte Ltd",

number = "1",

}

TY - JOUR

T1 - Photoluminescence properties of Er doped into C-rich SiC nanoparticle films

AU - Huang, Shiyong

AU - Xu, S.

AU - Long, Jidong

AU - Sun, Z.

AU - Wang, X. Z.

AU - Chen, Y. W.

AU - Chen, T.

AU - Ni, C.

AU - Zhang, Z. J.

AU - Wang, L. L.

AU - Li, X. D.

AU - Guo, P. S.

AU - Que, W. X.

PY - 2006/2

Y1 - 2006/2

N2 - Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen. Surface morphology and photoluminescence (PL) properties of them were measured by field-emission scanning electron microscope and Raman spectroscopy. The peak position, intensity, and the full width at half maximum (FWHM) of PL spectra were relevant with Er doping levels and deposition conditions.

AB - Polycrystalline silicon carbide (P-SiC) films containing SiC nanoparticles and Er were prepared by r.f. reactive magnetron co-sputtering technique with SiC and Er targets on low-temperature silicon (111) and silicon dioxide substrates with the mixed gas of pure argon, methane, and hydrogen. Surface morphology and photoluminescence (PL) properties of them were measured by field-emission scanning electron microscope and Raman spectroscopy. The peak position, intensity, and the full width at half maximum (FWHM) of PL spectra were relevant with Er doping levels and deposition conditions.

KW - Co-sputtering

KW - Er-doped

KW - Nanoparticle

KW - Photoluminescence

UR - https://www.scopus.com/pages/publications/33745685653

U2 - 10.1142/S0218625X06007834

DO - 10.1142/S0218625X06007834

M3 - 文章

AN - SCOPUS:33745685653

SN - 0218-625X

VL - 13

SP - 123

EP - 126

JO - Surface Review and Letters

JF - Surface Review and Letters

IS - 1

ER -

Photoluminescence properties of Er doped into C-rich SiC nanoparticle films

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Keywords

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