Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

Qilin Jiang; Long Chen; Jukun Liu; Yuchan Zhang; Shian Zhang; Donghai Feng; Tianqing Jia; Peng Zhou; Qian Wang; Zhenrong Sun; Hongxing Xu

doi:10.29026/oes.2023.220002

Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

Qilin Jiang
, Long Chen^*
, Jukun Liu
, Yuchan Zhang
, Shian Zhang
, Donghai Feng
, Tianqing Jia^*
, Peng Zhou
, Qian Wang
, Zhenrong Sun
, Hongxing Xu

^*Corresponding author for this work

Institute for Advanced Study in Precision Spectroscopy

Research output: Contribution to journal › Article › peer-review

23 Scopus citations

Abstract

This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.

Original language	English
Article number	220002
Journal	Opto-Electronic Science
Volume	2
Issue number	1
DOIs	https://doi.org/10.29026/oes.2023.220002
State	Published - Jan 2023

Keywords

ITO film
anisotropic electrical conductivity
femtosecond laser direct writing
periodic surface nanostructures
transparent nanowires

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10.29026/oes.2023.220002

Cite this

@article{6aa07c93b5b2488693a34429ac9276fe,

title = "Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing",

abstract = "This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10\%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21\% to 60\%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.",

keywords = "ITO film, anisotropic electrical conductivity, femtosecond laser direct writing, periodic surface nanostructures, transparent nanowires",

author = "Qilin Jiang and Long Chen and Jukun Liu and Yuchan Zhang and Shian Zhang and Donghai Feng and Tianqing Jia and Peng Zhou and Qian Wang and Zhenrong Sun and Hongxing Xu",

note = "Publisher Copyright: {\textcopyright} The Author(s) 2023.",

year = "2023",

month = jan,

doi = "10.29026/oes.2023.220002",

language = "英语",

volume = "2",

journal = "Opto-Electronic Science",

issn = "2097-0382",

publisher = "Editorial Office of Opto-Electronic Journals, Institute of Optics and Electronics, Chinese Academy of Sciences",

number = "1",

}

TY - JOUR

T1 - Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

AU - Jiang, Qilin

AU - Chen, Long

AU - Liu, Jukun

AU - Zhang, Yuchan

AU - Zhang, Shian

AU - Feng, Donghai

AU - Jia, Tianqing

AU - Zhou, Peng

AU - Wang, Qian

AU - Sun, Zhenrong

AU - Xu, Hongxing

N1 - Publisher Copyright: © The Author(s) 2023.

PY - 2023/1

Y1 - 2023/1

N2 - This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.

AB - This paper reports the fabrication of regular large-area laser-induced periodic surface structures (LIPSSs) in indium tin oxide (ITO) films via femtosecond laser direct writing focused by a cylindrical lens. The regular LIPSSs exhibited good properties as nanowires, with a resistivity almost equal to that of the initial ITO film. By changing the laser fluence, the nanowire resistances could be tuned from 15 to 73 kΩ/mm with a consistency of ±10%. Furthermore, the average transmittance of the ITO films with regular LIPSSs in the range of 1200–2000 nm was improved from 21% to 60%. The regular LIPSS is promising for transparent electrodes of nano-optoelectronic devices—particularly in the near-infrared band.

KW - ITO film

KW - anisotropic electrical conductivity

KW - femtosecond laser direct writing

KW - periodic surface nanostructures

KW - transparent nanowires

UR - https://www.scopus.com/pages/publications/85200743852

U2 - 10.29026/oes.2023.220002

DO - 10.29026/oes.2023.220002

M3 - 文章

AN - SCOPUS:85200743852

SN - 2097-0382

VL - 2

JO - Opto-Electronic Science

JF - Opto-Electronic Science

IS - 1

M1 - 220002

ER -

Periodic transparent nanowires in ITO film fabricated via femtosecond laser direct writing

Abstract

Keywords

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