Performance improvement of phase change memory cell by using a tantalum pentoxide buffer layer

  • Zhong Hua Zhang
  • , San Nian Song
  • , Zhi Tang Song
  • , Le Li
  • , Lan Lan Shen
  • , Tian Qi Guo
  • , Yan Cheng
  • , Shi Long Lv
  • , Liang Cai Wu
  • , Bo Liu
  • , Song Lin Feng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The performance of phase change memory (PCM) cell, based on Ti0.5Sb2Te3, was significantly improved by using a tantalum dioxide buffer layer. The presence of a buffer layer reduced the reset voltage of the PCM cell. The theoretical thermal simulation and calculation for the reset process were conducted to analyze the thermal effect of the titanium dioxide heating layer. The improved performance of the PCM cell with dioxide clad layer can be attributed to the fact that the buffer layer not only acted as heating layer but also efficiently reduced the cell dissipated power.

Original languageEnglish
Title of host publicationFunctional and Functionally Structured Materials
EditorsYafang Han, Ying Wu, Guangxian Li, Fusheng Pan, Xuefeng Liu, Runhua Fan
PublisherTrans Tech Publications Ltd
Pages425-429
Number of pages5
ISBN (Print)9783038357605
DOIs
StatePublished - 2016
Externally publishedYes
EventChinese Materials Congress on Functional and Functionally Structured Materials, CMC 2015 - Guiyang, China
Duration: 10 Jul 201514 Jul 2015

Publication series

NameMaterials Science Forum
Volume848
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Conference

ConferenceChinese Materials Congress on Functional and Functionally Structured Materials, CMC 2015
Country/TerritoryChina
CityGuiyang
Period10/07/1514/07/15

Keywords

  • Buffer layer
  • Phase change memory
  • Semiconductors
  • Tantalum pentoxide
  • Thin films
  • TiSbTe

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