Performance enhancement of nanotube junctionless FETs with low doping concentration rings

  • Liang Wang
  • , Wanyang Xiao
  • , Yueyang Wang
  • , Yonglin Bai
  • , Zirui Wang
  • , Jie Xu
  • , Min Tang
  • , Qiuxiang Zhang*
  • , Weijing Liu*
  • , Wei Bai
  • , Xiaodong Tang
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

To reduce the static power consumption of the NT JLFET and the effect of SCEs on the NT JLFET, A nanotube junctionless field effect transistor with cyclic low doping concentration regions (C NT JLFET) is proposed. Based on Sentaurus TCAD numerical simulations, the electrical properties of the C NT JLFET and the NT JLFET were comparatively investigated, and the effects of the length (L CD) and radius (R CD) of cyclic low doping concentration regions on the electrical properties of the C NT JLFETs were studied. The C NT JLFET reduces the gate-induced drain leakage (GIDL) due to lateral band-to-band-tunneling (L-BTBT) as compared to the NT JLFET. As the L CD or R CD increases, the off-state current decreases. In addition, the C NT JLFET suffers from fewer short channel effects (SCEs), such as threshold voltage roll-off, drain-induced barrier lowering and subthreshold swing deterioration, compared to the NT JLFET. The inhibition of L-BTBT and attenuation of SCEs by cyclic low doping concentration regions remains when the channel length of the C NT JLFET is shortened to 10 nm. The C NT JLFET are suitable for low power applications as they exhibit reduced L-BTBT and suffer from fewer SCEs.

Original languageEnglish
Article number075013
JournalSemiconductor Science and Technology
Volume39
Issue number7
DOIs
StatePublished - Jul 2024

Keywords

  • gate-induced drain leakage
  • lateral band-to-band-tunneling
  • nanotube junctionless FET
  • short channel effects

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