Abstract
PbZr0.5Ti0.5O3/La0.5Sr 0.5CoO3 (PZT/LSCO) heterostructures have been grown directly on (100)Si by chemical solution routes. Field-emission scanning electron microscopy and x-ray diffraction analysis show that PZT and LSCO thin films are polycrystalline and entirely perovskite phase. PZT thin films grown on LSCO thin films showed no preferential orientation and excellent ferroelectricity. The remnant polarization Pr is about 22.8 μC/cm2 and the coercive field Ec is about 95 kV/cm at an applied electric field of 400 kV/cm. The ferroelectric capacitor has been fabricated and showed no polarization fatigue after 3 × 109 fatigue cycles. The Pt/PZT/LSCO capacitor is suitable for nonvolatile random access memory application.
| Original language | English |
|---|---|
| Pages (from-to) | 3476-3478 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 79 |
| Issue number | 21 |
| DOIs | |
| State | Published - 19 Nov 2001 |
| Externally published | Yes |