On-Chip Tuning of the Resonant Wavelength in a High-Q Microresonator Integrated with a Microheater

We report on fabrication of a microtoroid resonator of a high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3-D) micromachining. The microheater, which is located about 200 µm away from the microresonator, has a footprint size of 200 µm × 400 µm. Tuning of the resonant wavelength in the microresonator has been achieved by varying the voltage applied on the microheater. The response time of the integrated chip is less than 10 seconds.