On-Chip Integrated Waveguide Amplifiers on Erbium-Doped Thin-Film Lithium Niobate on Insulator

  • Junxia Zhou
  • , Youting Liang
  • , Zhaoxiang Liu
  • , Wei Chu
  • , Haisu Zhang
  • , Difeng Yin
  • , Zhiwei Fang*
  • , Rongbo Wu
  • , Jianhao Zhang
  • , Wei Chen
  • , Zhe Wang
  • , Yuan Zhou
  • , Min Wang
  • , Ya Cheng*
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

165 Scopus citations

Abstract

On-chip light amplification with integrated optical waveguide fabricated on erbium-doped thin-film lithium niobate on insulator (TFLNOI) is demonstrated using the photolithography-assisted chemomechanical etching (PLACE) technique. A maximum internal net gain of 18 dB in the small-signal-gain regime is measured at the peak emission wavelength of 1530 nm for a waveguide length of 3.6 cm, indicating a differential gain per unit length of 5 dB cm−1. This work paves the way to the monolithic integration of diverse active and passive photonic components on the TFLNOI platform.

Original languageEnglish
Article number2100030
JournalLaser and Photonics Reviews
Volume15
Issue number8
DOIs
StatePublished - Aug 2021

Keywords

  • chemomechanical etching
  • erbium-doped waveguide amplifier
  • lithium niobate
  • photolithography
  • thin film

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