On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

Min Wang; Yingxin Xu; Zhiwei Fang; Yang Liao; Peng Wang; Wei Chu; Lingling Qiao; Jintian Lin; Wei Fang; Ya Cheng

doi:10.1364/OE.25.000124

On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

Min Wang
, Yingxin Xu
, Zhiwei Fang
, Yang Liao
, Peng Wang
, Wei Chu
, Lingling Qiao
, Jintian Lin
, Wei Fang
, Ya Cheng^*

^*Corresponding author for this work

CAS - Shanghai Institute of Optics and Fine Mechanics
University of Chinese Academy of Sciences
Zhejiang University
ShanghaiTech University
East China Normal University

Research output: Contribution to journal › Article › peer-review

62 Scopus citations

Abstract

We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.

Original language	English
Pages (from-to)	124-129
Number of pages	6
Journal	Optics Express
Volume	25
Issue number	1
DOIs	https://doi.org/10.1364/OE.25.000124
State	Published - 9 Jan 2017
Externally published	Yes

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10.1364/OE.25.000124

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title = "On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes",

abstract = "We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.",

author = "Min Wang and Yingxin Xu and Zhiwei Fang and Yang Liao and Peng Wang and Wei Chu and Lingling Qiao and Jintian Lin and Wei Fang and Ya Cheng",

note = "Publisher Copyright: {\textcopyright} 2017 Optical Society of America.",

year = "2017",

month = jan,

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doi = "10.1364/OE.25.000124",

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TY - JOUR

T1 - On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

AU - Wang, Min

AU - Xu, Yingxin

AU - Fang, Zhiwei

AU - Liao, Yang

AU - Wang, Peng

AU - Chu, Wei

AU - Qiao, Lingling

AU - Lin, Jintian

AU - Fang, Wei

AU - Cheng, Ya

PY - 2017/1/9

Y1 - 2017/1/9

N2 - We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.

AB - We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.

UR - https://www.scopus.com/pages/publications/85009799006

U2 - 10.1364/OE.25.000124

DO - 10.1364/OE.25.000124

M3 - 文章

C2 - 28085799

AN - SCOPUS:85009799006

SN - 1094-4087

VL - 25

SP - 124

EP - 129

JO - Optics Express

JF - Optics Express

IS - 1

ER -

On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

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