On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

Min Wang, Yingxin Xu, Zhiwei Fang, Yang Liao, Peng Wang, Wei Chu, Lingling Qiao, Jintian Lin, Wei Fang, Ya Cheng

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First, the metallic microelectrodes were fabricated on the substrate using a femtosecond laser. Then high-Q lithium niobate microresonator located between the microelectrodes was further fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Thanks to the efficient design, a high electro-optical tuning coefficient of 3.41 pm/V has been obtained.

Original languageEnglish
Pages (from-to)124-129
Number of pages6
JournalOptics Express
Volume25
Issue number1
DOIs
StatePublished - 9 Jan 2017

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