Abstract
The thermoelectric properties of boron-doped silicon microchannel plates (MCPs) were investigated. The samples were prepared by photo-assisted electrochemical etching (PAECE). The Seebeck coefficient and electrical resistivity at room temperature (25 °C) were measured to determine the thermoelectric properties of the samples. In order to decrease the very high resistivity, boron doping was introduced and by modulating the doping time, a series of samples with different resistivity as well as Seebeck coefficient were obtained. Boron doping changed the electrical resistivity of the samples from 1.5 × 105 Ω cm to 5.8 × 10-3 Ω cm, and the absolute Seebeck coefficient deteriorated relatively slightly from 674 μV/K to 159 μV/K. According to the Seebeck coefficient and electrical conductivity, the power factor was calculated and a peak value of 4.7 × 10-1 mW m-1 K-2 was obtained. The results indicate that silicon MCPs doped with boron are promising silicon-based thermoelectric materials.
| Original language | English |
|---|---|
| Pages (from-to) | 1618-1620 |
| Number of pages | 3 |
| Journal | Materials Letters |
| Volume | 65 |
| Issue number | 11 |
| DOIs | |
| State | Published - 15 Jun 2011 |
Keywords
- Boron doping
- Electrical properties
- Porous materials
- Thermoelectric materials