@inproceedings{b1fcb4d9264b4f9b85f7b8b82a1cf086,
title = "Novel silicon-on-insulator grating couplers based on CMOS poly-silicon gate layer",
abstract = "Grating couplers are widely investigated as a coupling interface between silicon-on-insulator waveguides and optical fibers. In this work, novel grating couplers based on strip poly-Si are proposed. This structure utilizes the poly-Si gate layer of the CMOS MOSFETs, and thus enables grating couplers integrated with CMOS circuits without adding any additional masks and process steps. Simulation results show that a coupling efficiency over 60\% can be achieved between silicon-on-insulator waveguides and fibers.",
keywords = "grating coupler, silicon-on-insulator (SOI), waveguides",
author = "Chao Qiu and Zhen Sheng and Le Li and Albert Pang and Aiming Wu and Junjie Du and Jing Chen and Xi Wang and Fuwan Gan and Shichang Zou",
year = "2011",
language = "英语",
isbn = "9780819489616",
series = "2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011",
booktitle = "2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011",
note = "2011 Asia Communications and Photonics Conference and Exhibition, ACP 2011 ; Conference date: 13-11-2011 Through 16-11-2011",
}