Abstract
The nitrogen (N) doping effect on crystal structure, optical band gap, and localized states for amorphous/crystalline GeTe films was studied. The crystallization temperature and sheet resistance were improved by N doping. The local bonding structure of amorphous and crystalline Nx(GeTe)1-x was elucidated by Raman spectra. The changes in optical band gap and localized states density for the films were evaluated by transmittance spectra. The band gap broadening after N doping is crucial to reducing the threshold current for phase change memory.
| Original language | English |
|---|---|
| Article number | 133199 |
| Journal | Materials Letters |
| Volume | 329 |
| DOIs | |
| State | Published - 15 Dec 2022 |
| Externally published | Yes |
Keywords
- Crystal structure
- Localized states
- Nitrogen doped GeTe
- Optical band gap
- Phase transformation