Nanoscale Analysis of Breakdown Induced Crack Propagation in DTSCR Devices

Xinqian Chen, Fei Hou, Zuoyuan Dong, Yuxin Zhang, Chaolun Wang, Fang Liang, Feibo Du, Zhiwei Liu, Xing Wu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

In the advanced technology process, owing to the low and tunable trigger voltage, diode-triggered SCRs (DTSCRs) are widely used in low-voltage applications with extremely narrow electrostatic discharge (ESD) design margins. The breakdown of DTSCRs ESD structure with abnormal leakage current under transmission line pulsing stressing was studied in this work. The physical origins of DTSCRs have been established through failure analysis (FA). The mismatch of the thermal expansion coefficient of local materials results in redundant stress. Such redundant stress induce the structure dislocations and cracks were captured by transmission electron microscopy at atomic scale. A multi-physical simulation is conducted to scrutinize the breakdown transient process.

Original languageEnglish
Title of host publication2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
PagesP481-P485
ISBN (Electronic)9781665479509
DOIs
StatePublished - 2022
Event2022 IEEE International Reliability Physics Symposium, IRPS 2022 - Dallas, United States
Duration: 27 Mar 202231 Mar 2022

Publication series

NameIEEE International Reliability Physics Symposium Proceedings
Volume2022-March
ISSN (Print)1541-7026

Conference

Conference2022 IEEE International Reliability Physics Symposium, IRPS 2022
Country/TerritoryUnited States
CityDallas
Period27/03/2231/03/22

Keywords

  • Electric breakdown
  • crack
  • electrostatic discharge
  • failure analysis
  • silicon-controlled rectifier
  • transmission electron microscopy

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