Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon

S. M. Huang; Z. Sun; B. S. Luk'yanchuk; M. H. Hong; L. P. Shi

doi:10.1063/1.1886896

Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon

S. M. Huang^*
, Z. Sun
, B. S. Luk'yanchuk
, M. H. Hong
, L. P. Shi

^*Corresponding author for this work

School of Physics and Electronic Science

Research output: Contribution to journal › Article › peer-review

60 Scopus citations

Abstract

Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.

Original language	English
Article number	161911
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	86
Issue number	16
DOIs	https://doi.org/10.1063/1.1886896
State	Published - 18 Apr 2005

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title = "Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon",

abstract = "Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.",

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AU - Huang, S. M.

AU - Sun, Z.

AU - Luk'yanchuk, B. S.

AU - Hong, M. H.

AU - Shi, L. P.

PY - 2005/4/18

Y1 - 2005/4/18

N2 - Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.

AB - Two-dimensional (2D) nanobump arrays were fabricated by laser irradiation of a regular lattice of absorptive polystyrene (PS) microspheres on an undoped (100) Si wafer. The experiments were performed with single-pulse 248 nm KrF laser radiation. The structure of the arrays fabricated by this method was characterized by field emission scanning electron microscope and atomic force microscope. The near-field effects under the absorptive particle are studied. The ablation and thermal processes induced by the optical near-field around the particles are investigated. The formation mechanism of nanobumps is discussed.

UR - https://www.scopus.com/pages/publications/20844440498

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DO - 10.1063/1.1886896

M3 - 文章

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 16

M1 - 161911

ER -

Nanobump arrays fabricated by laser irradiation of polystyrene particle layers on silicon

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