Multi-channel laser interferometer based on automatic frequency stabilization system for improving coordinate measurement accuracy

Chengkai Pang, Qiongqiong Zhang, Hongqiao Zhang, Haiyan Huang, Zejiang Deng, Guang Wu

Research output: Contribution to journalArticlepeer-review

Abstract

A multi-channel laser interferometer (MCLI) is proposed to improve the coordinate measurement accuracy. A 780 nm external cavity laser is locked on the D2 line of 87Rb atom by polarization spectroscopy, and a high frequency stabilized laser source is obtained with a linewidth of 385.8 kHz at root mean square (RMS). The interferometers share the stabilized source and individually install on 4 axes of a coordinate measuring system. As a result, the measurement uncertainty is reduced from 1.2 µm to 0.2 µm within the dynamic measurement range of 1.0 m. The MCLI is adept at integrate and flexible installation, which caters to various applications on precision measurement.

Original languageEnglish
Pages (from-to)588-594
Number of pages7
JournalOptoelectronics Letters
Volume18
Issue number10
DOIs
StatePublished - Oct 2022

Keywords

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