Monte Carlo simulation of MBE growth on GaAs vicinal surface

  • Huibing Mao*
  • , Wei Lu
  • , Zhaohui Ma
  • , Xingquan Liu
  • , Xuechu Shen
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, the MBE nucleation mode on vicinal GaAs(001) surface was simulated by Monte Carlo method. The results show that on A-surface the 2-D nucleation mode is dominant at 800-1000K, on B-surface the 2-D nucleation mode is dominant at low temperature, but at high temperature the step flow mode is dominant. Besides, there is saturation phenomenon at both high and low temperatures.

Original languageEnglish
Pages (from-to)1118-1122
Number of pages5
JournalWuli Xuebao/Acta Physica Sinica
Volume43
Issue number7
StatePublished - Jul 1994
Externally publishedYes

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