MOEMS tunable optical filter based on photonic crystals

Huibing Mao; Weiping Jing

doi:10.1117/1.2109792

MOEMS tunable optical filter based on photonic crystals

Huibing Mao^*
, Weiping Jing

^*Corresponding author for this work

School of Physics and Electronic Science

Nantong University

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

1-D photonic crystals with defects such as (L₁H ₁)^mL_cH₂(L₂H ₂)ⁿ are investigated. The bandgap edge transmission peak is narrowed when the couple layer L_C and the cover layer H ₂(L₂H₂)ⁿ are added to the photonic crystal (L₁H₁)^m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.

Original language	English
Article number	041301
Journal	Journal of Microlithography, Microfabrication and Microsystems
Volume	4
Issue number	4
DOIs	https://doi.org/10.1117/1.2109792
State	Published - Oct 2005

Keywords

MEMS
MOEMS
Photonic crystal
Tunable optical filter

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@article{c725a381e2144aaeb8aff88bf0a38654,

title = "MOEMS tunable optical filter based on photonic crystals",

abstract = "1-D photonic crystals with defects such as (L1H 1)mLcH2(L2H 2)n are investigated. The bandgap edge transmission peak is narrowed when the couple layer LC and the cover layer H 2(L2H2)n are added to the photonic crystal (L1H1)m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.",

keywords = "MEMS, MOEMS, Photonic crystal, Tunable optical filter",

author = "Huibing Mao and Weiping Jing",

year = "2005",

month = oct,

doi = "10.1117/1.2109792",

language = "英语",

volume = "4",

journal = "Journal of Microlithography, Microfabrication and Microsystems",

issn = "1537-1646",

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TY - JOUR

T1 - MOEMS tunable optical filter based on photonic crystals

AU - Mao, Huibing

AU - Jing, Weiping

PY - 2005/10

Y1 - 2005/10

N2 - 1-D photonic crystals with defects such as (L1H 1)mLcH2(L2H 2)n are investigated. The bandgap edge transmission peak is narrowed when the couple layer LC and the cover layer H 2(L2H2)n are added to the photonic crystal (L1H1)m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.

AB - 1-D photonic crystals with defects such as (L1H 1)mLcH2(L2H 2)n are investigated. The bandgap edge transmission peak is narrowed when the couple layer LC and the cover layer H 2(L2H2)n are added to the photonic crystal (L1H1)m. Three different structures are studied. Structure A is not suitable for the tunable filter, which has two discrete tuning regions. Structures B and C provide good optical tuning methods: large dynamic range (>150 nm), narrow bandwidth [full-width at half maximum (FWHM) is about 2 nm], and good tuning linearity. These structures can be easily fabricated by the surface micromachined technique.

KW - MEMS

KW - MOEMS

KW - Photonic crystal

KW - Tunable optical filter

UR - https://www.scopus.com/pages/publications/33747615458

U2 - 10.1117/1.2109792

DO - 10.1117/1.2109792

M3 - 文章

AN - SCOPUS:33747615458

SN - 1537-1646

VL - 4

JO - Journal of Microlithography, Microfabrication and Microsystems

JF - Journal of Microlithography, Microfabrication and Microsystems

IS - 4

M1 - 041301

ER -

MOEMS tunable optical filter based on photonic crystals

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Keywords

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