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Microstructural Evolution and Reliability Analysis of RDL Copper Interconnects under High-Temperature Conditions

  • Peng Xu
  • , Lan Li
  • , Jialu Huang
  • , Yu Yao
  • , Hengchang Bi
  • , Jiang Xia
  • , Zongyi Li
  • , Zuoyuan Dong*
  • , Xing Wu
  • *Corresponding author for this work
  • East China Normal University
  • Ltd.
  • Peking University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this work, we conduct an in situ thermal experiment focused on redistribution layers (RDLs) copper interconnect structures in integrated circuits (ICs), utilizing advanced characterization techniques such as focused ion beam (FIB) and transmission electron microscopy (TEM). The experiment reveals the formation of dislocations and void defects within the copper during heating, indicating underlying microstructural failure mechanisms induced by thermal stress. These findings highlight critical reliability concerns associated with copper interconnects under high-temperature conditions in IC applications, providing valuable insights for the design of advanced packaging.

Original languageEnglish
Title of host publication2025 IEEE 16th International Conference on ASIC, ASICON 2025
PublisherIEEE Computer Society
ISBN (Electronic)9798331539177
DOIs
StatePublished - 2025
Event2025 IEEE 16th International Conference on ASIC, ASICON 2025 - Kunming, China
Duration: 21 Oct 202524 Oct 2025

Publication series

NameProceedings of International Conference on ASIC
ISSN (Print)2162-7541
ISSN (Electronic)2162-755X

Conference

Conference2025 IEEE 16th International Conference on ASIC, ASICON 2025
Country/TerritoryChina
CityKunming
Period21/10/2524/10/25

Keywords

  • FIB
  • defects
  • in situ TEM
  • interconnect
  • reliability

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