Abstract
Textured Ca modified (Pb, La)TiO3 (PLCT) films were deposited on Pt/Ti/SiO2/Si substrates using a metal-organic decomposition (MOD) process. The microstructure of the PLCT thin film was investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscopy (TEM). Electric properties were measured using the Pt/PLCT/Pt capacitor structure. The PLCT films exhibit good ferroelectric and dielectric properties.
| Original language | English |
|---|---|
| Article number | 2862 |
| Pages (from-to) | 219-224 |
| Number of pages | 6 |
| Journal | Materials Letters |
| Volume | 47 |
| Issue number | 4-5 |
| DOIs | |
| State | Published - 2001 |
| Externally published | Yes |