Microstructural and electrical properties in textured lead calcium lanthanum titanate thin films deposited on a Pt/Ti/SiO2/Si substrate

  • Zhitang Song*
  • , Chenglu Lin
  • , Lianwei Wang
  • , Shixin Wang
  • , Lumin Wang
  • , Jianxia Gao
  • , Xiaorong Fu
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

Textured Ca modified (Pb, La)TiO3 (PLCT) films were deposited on Pt/Ti/SiO2/Si substrates using a metal-organic decomposition (MOD) process. The microstructure of the PLCT thin film was investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscopy (TEM). Electric properties were measured using the Pt/PLCT/Pt capacitor structure. The PLCT films exhibit good ferroelectric and dielectric properties.

Original languageEnglish
Article number2862
Pages (from-to)219-224
Number of pages6
JournalMaterials Letters
Volume47
Issue number4-5
DOIs
StatePublished - 2001
Externally publishedYes

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