Abstract
The recent progress in MBE growth of HgCdTe at the Research Center for Advanced Materials and Devices, and the National Laboratory for Infrared Physics is reported. It is found that the excellent compositional uniformity and reproducibility of HgCdTe can be archived by MBE technique. The results of surface morphology, dislocation density, electrical properties and focal plane array detectors are described in the paper.
| Original language | English |
|---|---|
| Pages (from-to) | 311-316 |
| Number of pages | 6 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4086 |
| DOIs | |
| State | Published - 2000 |
| Externally published | Yes |
| Event | 4th International Conference on Thin Film Physics and Applications - Shanghai, China Duration: 8 May 2000 → 11 May 2000 |
Keywords
- Annealing
- Dislocations
- Focal plane arrays
- HgCdTe
- MBE