@inproceedings{acb884ea77a249a39fa5a582adde5c7d,
title = "Laser induced damage in porous glass - A pathway to 3D fabrication of micro-/nanofluidics",
abstract = "We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nano-void with a lateral size of -40 nm and an axial size of -1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. The single nano-voids can be smoothly connected into a continuous nanochannel by water-assisted femtosecond laser direct writing. With this technique, integrated micro-nanofluidic systems have been achieved by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been applied to demonstrate DNA analysis, e. g., stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.",
keywords = "direct writing, femtosecond laser, nanochannels, porous glass, three dimensional",
author = "Ya Cheng and Yang Liao and Koji Sugioka",
year = "2013",
doi = "10.1117/12.2020480",
language = "英语",
isbn = "9780819496027",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Pacific Rim Laser Damage 2013",
note = "Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers ; Conference date: 19-05-2013 Through 22-05-2013",
}