Large enhancement of the thermoelectric Seebeck coefficient for amorphous oxide semiconductor superlattices with extremely thin conductive layers

  • Hiromichi Ohta*
  • , Rong Huang
  • , Yuichi Ikuhara
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

Herein we demonstrate that amorphous oxide semiconductor (AOS) superlattices composed of a-In-Zn-O (well) and a-In-Ga-Zn-O (barrier) layers, fabricated on SiO2 glass substrate by pulsed laser deposition at room temperature, exhibited an enhanced Seebeck coefficient |S |. The |S | value increases drastically with decreasing a-In-Zn-O thickness (dIZO) when dIZO < ∼5 nm, and reached 73 uV K (dIZO = 0.3 nm), which is ∼4 times larger than that of bulk |S|3D(19 uV K '), while it kept its high electrical conductivity, clearly demonstrating that the quantum size effect can be utilized in AOS superlattices.

Original languageEnglish
Pages (from-to)105-107
Number of pages3
JournalPhysica Status Solidi - Rapid Research Letters
Volume2
Issue number3
DOIs
StatePublished - 2008
Externally publishedYes

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