Label-free DNA detection based on silicon nanowires

  • A. R. Gao
  • , N. Lu
  • , X. L. Gao
  • , P. F. Dai
  • , T. Li*
  • , Y. B. Gong
  • , C. H. Fan
  • , Y. L. Wang
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

Based on silicon nanowires (SiNWs) fabricated by MEMS technology, highly sensitive, sequence-specific and label-free DNA sensors were demonstrated in this paper. Optical lithography and anisotropic self-stop etching were employed to guarantee low cost batch production for SiNWs. Amine-functionalized SiNWs exhibit pH-dependent linear current over a wide range. SiNWs with chemically functionalized single-stranded DNA can recognize the complementary DNA at pM range. In contrast, there is no current change for non-complementary DNA even at a high concentration. With small size and potential for mass production, SiNWs can be potentially developed to become a portable biosensor.

Original languageEnglish
Title of host publication2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages2271-2274
Number of pages4
DOIs
StatePublished - 2011
Externally publishedYes
Event2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/TerritoryChina
CityBeijing
Period5/06/119/06/11

Keywords

  • DNA
  • FET
  • SiNWs
  • label-free

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